Hexamethyldisilazane (HMDZ)

Hexamethyldisilazane (HMDZ) is a colorless, volatile liquid organosilicon compound widely recognized as one of the most effective and economical silylating agents in organic synthesis and semiconductor manufacturing. It reacts readily with active hydrogen-containing compounds (especially –OH groups) to form stable trimethylsilyl (TMS) derivatives, making it essential for surface treatment, hydrophobization, and protecting group chemistry.

Technical Specifications

Packaging and Storage

• Net weight 150kg steel drum or 750kg IBC tank
• Keep away from heat, sparks, open flames, hot surfaces. No smoking. Store in a well-ventilated place. Keep container tightly closed. Store in a well-ventilated place. Keep cool.

Key Applications of Hexamethyldisilazane (HMDZ)

Semiconductor Industry:
Primary adhesion promoter (primer) for photoresists in photolithography. HMDS creates a hydrophobic surface on silicon wafers, significantly improving photoresist adhesion and reducing lift-off defects.

Surface Treatment & Hydrophobization:
Converts hydroxyl groups on silica, glass, metals, and fillers into trimethylsilyloxy groups, making surfaces highly hydrophobic.

Analytical Chemistry:
Preferred reagent for trimethylsilylation of alcohols, amines, carboxylic acids, and amino acids prior to GC-MS analysis.

Pharmaceutical & Peptide Synthesis:
Blocking/protecting agent for hydroxyl and amino groups; end-capping reagent in silicone polymer production.

Organic Synthesis:
Source of trimethylsilyl groups in numerous reactions (e.g., protection of alcohols, preparation of TMS ethers and enol ethers).

Frequently Asked Questions (FAQs)

Why is HMDZ used as a photoresist adhesion promoter in semiconductor manufacturing?
HMDZ vapor or spin-coating converts the hydrophilic Si-OH groups on the wafer surface into hydrophobic Si-O-Si(CH₃)₃ groups, dramatically improving photoresist wetting and adhesion while preventing undercutting and pattern collapse.

Can HMDZ be used for GC derivatization?
Yes. HMDZ is widely used (often in combination with TMCS or TMSCl) to derivatize alcohols, phenols, carboxylic acids, amines, and amino acids for GC-MS analysis.

Is HMDZ compatible with my solvent system?
HMDZ is fully miscible with non-protic organic solvents such as toluene, xylene, hexane, chloroform, dichloromethane, and ethers.

Can HMDZ be used instead of TMSCl (chlorotrimethylsilane)?
HMDZ is often preferred because it is less corrosive, easier to handle, and produces ammonia instead of HCl as a by-product.

Where can I buy Hexamethyldisilazane (HMDZ)?

You can contact us via email [email protected] for offers and bulk orders.